Part 3 – MEMS technology

Part 3 – MEMS technology

MEMS technology

At a glance
In the previous section (part 2) we got to know the vibration measuring method. This section deals with the establishment of MEMS technology at TrueDyne Sensors AG. The technology has brought about the MEMS sensor, the heart of which is an oscillating silicon measuring channel. Compared to conventional resonator technology, it combines numerous advantages. These range from its small size and a wide range of applications to the exact determination of the density of gases, even at low pressure, and an extremely fast reaction time.

Part 2 – The resonator density measurement

Part 2 – The resonator density measurement

The resonator density measurement

At a glance
In the previous part (1) we learned about the basics of density measurement and the definition of density. This section is dedicated to the vibration method which is also used by density sensors for density measurement. This method also has some advantages and disadvantages, which are explained in detail.

Part 1 – Density measurement basics

Part 1 – Density measurement basics

Density measurement basics

At a glance
This section gives you a first insight into the basics of density measurement. You will learn that density is a temperature and pressure-dependent substance property which is often specified with the unit kg/m3 or lb/ft3. The density value is required for determining concentration, average molecular weight and content. For finding the density of gases, it must be noted that this density depends on the respective pressure. The density of liquids depends on the temperature.