Part 3 – MEMS technology
MEMS technology
At a glance
In the previous section (part 2) we got to know the vibration measuring method. This section deals with the establishment of MEMS technology at TrueDyne Sensors AG. The technology has brought about the MEMS sensor, the heart of which is an oscillating silicon measuring channel. Compared to conventional resonator technology, it combines numerous advantages. These range from its small size and a wide range of applications to the exact determination of the density of gases, even at low pressure, and an extremely fast reaction time.
In the previous section (part 2) we got to know the vibration measuring method. This section deals with the establishment of MEMS technology at TrueDyne Sensors AG. The technology has brought about the MEMS sensor, the heart of which is an oscillating silicon measuring channel. Compared to conventional resonator technology, it combines numerous advantages. These range from its small size and a wide range of applications to the exact determination of the density of gases, even at low pressure, and an extremely fast reaction time.