Density and Concentration Measurement Applications for Novel MEMS-based Micro Densitometer for Gas

C. Huber, TrueDyne Sensors AG, Reinach BL (Switzerland), Endress+Hauser Flowtec, Reinach BL (Switzerland)

Abstract

A MEMS cantilever based resonant device for gas monitoring actuated and sensed piezoelectrically, has been designed, simulated, fabricated and tested. Aluminum Nitride (AlN) has been used as active material to implement the piezoelectric actuator and sensor. Simulation performed using COMSOL and measurements show a very good agreement. The final system, the full sensor for gas monitoring, allows the measurement of gas density and viscosity at temperatures between 0 and 60 °C and pres-sures between 1 and 10 bar abs. with accuracies of <0.03 kg/m3 and 6% respectively. A second tech-nological run that aims to improve the viscosity accuracy is ongoing.

Event
18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016
2016-05-10 – 2016-05-11
Nürnberg, Germany
Band
SMSI 2020
Sensors and Instrumentation
Chapter
4.2 New aspects in gas detection
DOI
10.5162/sensoren2016/4.2.2
ISBN
978-3-9816876-0-6

Download article

(english version)

Link to AMA

(external Link)

Other articles that might interest you

Applications that might interest you

Monitoring of fuel concentrations
From volume (l) to mass (kg)
Monitoring of welding gas mixtures
Monitoring of gas mixtures for food packages
©Article: AMA 10.5162/sensoren2016/4.2.2- 2016