Density and Concentration Measurement Applications for Novel MEMS-based Micro Densitometer for Gas

C. Huber, TrueDyne Sensors AG, Reinach BL (Switzerland), Endress+Hauser Flowtec, Reinach BL (Switzerland)


A MEMS cantilever based resonant device for gas monitoring actuated and sensed piezoelectrically, has been designed, simulated, fabricated and tested. Aluminum Nitride (AlN) has been used as active material to implement the piezoelectric actuator and sensor. Simulation performed using COMSOL and measurements show a very good agreement. The final system, the full sensor for gas monitoring, allows the measurement of gas density and viscosity at temperatures between 0 and 60 °C and pres-sures between 1 and 10 bar abs. with accuracies of <0.03 kg/m3 and 6% respectively. A second tech-nological run that aims to improve the viscosity accuracy is ongoing.

18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016
2016-05-10 – 2016-05-11
Nürnberg, Germany
SMSI 2020
Sensors and Instrumentation
4.2 New aspects in gas detection

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©Article: AMA 10.5162/sensoren2016/4.2.2- 2016